Areas of research

  • Microengineering methods of microsystems and micromechanisms fabrication
  • Nanoengineering and nanostructurization of solid state body surface
  • Vacuum nano/microelectronics
  • Microfluidics, lab-on-a-chips, analytical microsystems
  • Intelligent microreactors, chemical micro-instrumentation
  • Micromechanical sensors of physical, chemical and biochemical quantities
  • "Intelligent" miniature sensors systems
  • Computer controlled embedded systems
  • Computer aided electrical and optical biochemical signal processing