Modelling of microsystems

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Today’s fabrication of each microsystems starts with simulation of work of the components of microsystems and optimization of its construction.

“Modelling of microsystems” course (computer laboratory) following lecture on technology and principle of work of microsystems (Microsystems) introduces students to solving technical problems of designing of various microsystems. Students participating in the course are designing MEMS structures – for example membranes of piezoresistive and capacitance pressure sensors, microfluidical channels of mixers and other - by the application of the AutoCAD software. Next, work of designed microstructures is simulated under Comsol Multiphysics package. This software utilizes specialized MEMS module with micromechanics, electrostatic, chemical and micro-fluidic solvers.


  • positively passed Microsystems lecture,
  • basic knowledge of silicon-glass MEMS structures and silicon, glass material properties.

Helpful skills:

  • designing under AutoCAD software.

Materials for students:

1. Instrukcja AutoCAD

Laboratorium 1 - Modelowanie pracy mikromechanicznego czujnika ciśnienia

plik z rysunkiem membrany krzemowej

3. Laboratorium 2 - Modelowanie pracy mikromechanicznego pojemnościowego czujnika ciśnienia z membraną typu bossed
4. Laboratorium 3 - Modelowanie chipu biologicznego – biochipu

Laboratorium 4 - Modelowanie chłodziarki wielkoobszarowej dla mikroreaktorów chemicznych

* Raport